Resolution enhancement techniques in optical lithography/ Alfred Kwok-Kit Wong.
Material type: TextLanguage: Eng Series: Tutorial texts in optical engineering ; v. TT 47Publication details: Bellingham: SPIE Press, c2001.Description: 214 p.: illISBN:- 0819439959 (softcover)
- 621.381531 22 WON-R
Item type | Current library | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|
Books | IISER Central Library Third Floor - Right Wing | 530.0724 WON-R (Browse shelf(Opens below)) | Available | 0002228 |
Includes bibliographical references and index.
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