Resolution enhancement techniques in optical lithography/
Wong, Alfred Kwok-Kit.
Resolution enhancement techniques in optical lithography/ Alfred Kwok-Kit Wong. - Bellingham: SPIE Press, c2001. - 214 p.: ill.; - Tutorial texts in optical engineering ; v. TT 47 .
Includes bibliographical references and index.
0819439959 (softcover)
Electronics
Integrated circuits
Microlithography.
Design and construction.
621.381531 / WON-R
Resolution enhancement techniques in optical lithography/ Alfred Kwok-Kit Wong. - Bellingham: SPIE Press, c2001. - 214 p.: ill.; - Tutorial texts in optical engineering ; v. TT 47 .
Includes bibliographical references and index.
0819439959 (softcover)
Electronics
Integrated circuits
Microlithography.
Design and construction.
621.381531 / WON-R