Resolution enhancement techniques in optical lithography/ (Record no. 1086)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00862cam a22002774a 4500 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | inmoiis |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20211220162903.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 120614t xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0819439959 (softcover) |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | inmoiis |
| Modifying agency | IISER Mohali |
| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | Eng |
| 044 ## - COUNTRY OF PUBLISHING/PRODUCING ENTITY CODE | |
| MARC country code | XXU |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 |
| Edition number | 22 |
| Item number | WON-R |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Wong, Alfred Kwok-Kit. |
| 9 (RLIN) | 750 |
| 245 10 - TITLE STATEMENT | |
| Title | Resolution enhancement techniques in optical lithography/ |
| Statement of responsibility, etc | Alfred Kwok-Kit Wong. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | Bellingham: |
| Name of publisher, distributor, etc | SPIE Press, |
| Date of publication, distribution, etc | c2001. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 214 p.: |
| Other physical details | ill.; |
| 440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE | |
| Title | Tutorial texts in optical engineering ; |
| Volume number/sequential designation | v. TT 47 |
| 9 (RLIN) | 751 |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Electronics |
| 9 (RLIN) | 752 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Integrated circuits |
| 9 (RLIN) | 753 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microlithography. |
| 9 (RLIN) | 754 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Design and construction. |
| 9 (RLIN) | 755 |
| 902 ## - LOCAL DATA ELEMENT B, LDB (RLIN) | |
| 0 | IISER Mohali |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Vendor name/Source of acquisition | Cost, normal purchase price | Total Checkouts | Barcode | Date last seen | Cost, replacement price | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Dewey Decimal Classification | IISER Central Library | IISER Central Library | Third Floor - Right Wing | 14/06/2012 | SIPE | 1675.45 | 0002228 | 15/03/2022 | 0.00 | 28/07/2010 | Books |