| 000 | 01098cam a22003014a 4500 | ||
|---|---|---|---|
| 003 | inmoiis | ||
| 005 | 20171025190540.0 | ||
| 020 |
_a0849328381 (alk. paper) _a9780849328381 |
||
| 040 | _ainmoiis | ||
| 041 | _aEng | ||
| 044 | _aXXU | ||
| 082 | 0 | 0 |
_a621.381 _222 _bLYS-N |
| 100 | 1 |
_aLyshevski, Sergey Edward. _98377 |
|
| 245 | 1 | 0 |
_aNano- and micro-electromechanical systems : _bfundamentals of nano- and microengineering _cSergey Edward Lyshevski. |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton _bCRC Press, _c2005. |
||
| 300 |
_a722 p. : _bill. ; |
||
| 440 | 0 |
_aNano- and microscience, engineering, technology, and medicine series ; _v8 _98378 |
|
| 500 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aElectronics _98379 |
|
| 650 | 0 |
_aMicroelectromechanical systems. _94433 |
|
| 650 | 0 |
_aNanotechnology. _98380 |
|
| 650 | 0 |
_aMicroengineering _94434 |
|
| 902 | _0IISER Mohali | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c2594 _d2594 |
||