| 000 | 00862cam a22002774a 4500 | ||
|---|---|---|---|
| 999 |
_c1086 _d1086 |
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| 003 | inmoiis | ||
| 005 | 20211220162903.0 | ||
| 008 | 120614t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0819439959 (softcover) | ||
| 040 |
_ainmoiis _dIISER Mohali |
||
| 041 | _aEng | ||
| 044 | _aXXU | ||
| 082 | 0 | 0 |
_a621.381531 _222 _bWON-R |
| 100 | 1 |
_aWong, Alfred Kwok-Kit. _9750 |
|
| 245 | 1 | 0 |
_aResolution enhancement techniques in optical lithography/ _cAlfred Kwok-Kit Wong. |
| 260 |
_aBellingham: _bSPIE Press, _cc2001. |
||
| 300 |
_a214 p.: _bill.; |
||
| 440 | 0 |
_aTutorial texts in optical engineering ; _vv. TT 47 _9751 |
|
| 500 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aElectronics _9752 |
|
| 650 | 0 |
_aIntegrated circuits _9753 |
|
| 650 | 0 |
_aMicrolithography. _9754 |
|
| 650 | 0 |
_aDesign and construction. _9755 |
|
| 902 | _01 | ||
| 942 | _cBK | ||