Nano- and micro-electromechanical systems :
Lyshevski, Sergey Edward.
Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering Sergey Edward Lyshevski. - 2nd ed. - Boca Raton CRC Press, 2005. - 722 p. : ill. ; - Nano- and microscience, engineering, technology, and medicine series ; 8 .
Includes bibliographical references and index.
0849328381 (alk. paper) 9780849328381
Electronics
Microelectromechanical systems.
Nanotechnology.
Microengineering
621.381 / LYS-N
Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering Sergey Edward Lyshevski. - 2nd ed. - Boca Raton CRC Press, 2005. - 722 p. : ill. ; - Nano- and microscience, engineering, technology, and medicine series ; 8 .
Includes bibliographical references and index.
0849328381 (alk. paper) 9780849328381
Electronics
Microelectromechanical systems.
Nanotechnology.
Microengineering
621.381 / LYS-N